Fabrication of optical multilayer devices from porous silicon coatings with closed porosity by magnetron sputtering

Jaime Caballero-Hernandez; Vanda Godinho; Bertrand Lacroix; Mari-Carmen Jimenez de Haro; Damien Jamon; Asuncion Fernandez

doi:10.1021/acsami.5b02356

Journal articles

Fabrication of optical multilayer devices from porous silicon coatings with closed porosity by magnetron sputtering

Jaime Caballero-Hernandez ¹ Vanda Godinho ¹ Bertrand Lacroix ¹ Mari-Carmen Jimenez de Haro ¹ Damien Jamon ² Asuncion Fernandez ¹

1 ICMSE - Instituto de Ciencia de Materiales de Sevilla

2 LHC - Laboratoire Hubert Curien [Saint Etienne]

Document type :

Journal articles

Domain :

Physics [physics]

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https://hal-ujm.archives-ouvertes.fr/ujm-01161604
Contributor : Damien Jamon Connect in order to contact the contributor
Submitted on : Monday, June 8, 2015 - 5:23:56 PM
Last modification on : Saturday, October 9, 2021 - 3:32:49 AM

Fabrication of optical multilayer devices from porous silicon coatings with closed porosity by magnetron sputtering

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Fabrication of optical multilayer devices from porous silicon coatings with closed porosity by magnetron sputtering

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