Fabrication of optical multilayer devices from porous silicon coatings with closed porosity by magnetron sputtering

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https://hal-ujm.archives-ouvertes.fr/ujm-01161604
Contributor : Damien Jamon <>
Submitted on : Monday, June 8, 2015 - 5:23:56 PM
Last modification on : Thursday, July 26, 2018 - 1:11:08 AM

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Jaime Caballero-Hernandez, Vanda Godinho, Bertrand Lacroix, Mari-Carmen Jimenez de Haro, Damien Jamon, et al.. Fabrication of optical multilayer devices from porous silicon coatings with closed porosity by magnetron sputtering. Applied Materials and Interfaces, 2015, 7 (25), pp.13889-13897. ⟨10.1021/acsami.5b02356⟩. ⟨ujm-01161604⟩

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