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Journal Articles ACS Applied Materials & Interfaces Year : 2015

Fabrication of optical multilayer devices from porous silicon coatings with closed porosity by magnetron sputtering

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ujm-01161604 , version 1 (08-06-2015)

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Jaime Caballero-Hernandez, Vanda Godinho, Bertrand Lacroix, Mari-Carmen Jimenez de Haro, Damien Jamon, et al.. Fabrication of optical multilayer devices from porous silicon coatings with closed porosity by magnetron sputtering. ACS Applied Materials & Interfaces, 2015, 7 (25), pp.13889-13897. ⟨10.1021/acsami.5b02356⟩. ⟨ujm-01161604⟩
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