Process Window Optimizer for pattern based defect prediction on 28nm Metal Layer

P Fanton; R La Greca; V Jain; C Prentice; J-G Simiz; S Hunsche; B Le-Gratiet; L Depre

Process Window Optimizer for pattern based defect prediction on 28nm Metal Layer

P Fanton ¹ R La Greca ² V Jain ³ C Prentice ² J-G Simiz ^{4, 1} S Hunsche ³ B Le-Gratiet ¹ L Depre ²

1 ST-CROLLES - STMicroelectronics [Crolles]

2 ASML SARL

3 ASML US

4 LHC - Laboratoire Hubert Curien [Saint Etienne]

Abstract : At the 28nm technology node and below, hot spot prediction and process window control across production wafers have become increasingly critical. We establish proof of concept for ASML's holistic lithography hot spot detection and defect monitoring flow, process window optimizer (PWO), for a 28nm metal layer process. We demonstrate prediction and verification of defect occurenceon wafer that arise from focus variations exceeding process window margins of device hotspots. We also estimate the improvement potential if design aware scanner control was applied.

Type de document :

Poster

SPIE Advanced Lithography 2016, Feb 2016, San José, CA, United States. 9778, Proceedings of SPIE

Domaine :

Sciences de l'ingénieur [physics] / Micro et nanotechnologies/Microélectronique

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https://hal-ujm.archives-ouvertes.fr/ujm-01272884
Contributeur : Jean-Gabriel Simiz <>
Soumis le : mercredi 17 février 2016 - 14:09:00
Dernière modification le : jeudi 26 juillet 2018 - 01:10:20
Document(s) archivé(s) le : mercredi 18 mai 2016 - 13:13:51

Process Window Optimizer for pattern based defect prediction on 28nm Metal Layer

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Process Window Optimizer for pattern based defect prediction on 28nm Metal Layer

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819

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