Cost effective and large area process for the functionalization and surface micro-structuring using photo-patternable TiO2 sol-gel process and colloidal photolithography

Loic Berthod (1, 2) , Olga Shavdina (1, 3) , Francis Vocanson (1) , Michel Langlet (2) , O. Dellea (3) , C. Veillas (1) , S Reynaud (1) , I. Verrier (1) , Yves Jourlin (1)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique
3 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux

Domaines: Matériaux; Optique [physics.optics]

Loic Berthod, Olga Shavdina, Francis Vocanson, Michel Langlet, O. Dellea, et al.. Cost effective and large area process for the functionalization and surface micro-structuring using photo-patternable TiO2 sol-gel process and colloidal photolithography. 2016 PHOTONICS EUROPE (SPIE), Apr 2016, BRUXELLES, Belgium. ⟨ujm-01301967⟩