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Microstructuring and functionalization layers using direct photo-patternable TiO2 sol-gel process and colloidal photolithography

Loic Berthod 1 O Shavdina 2, 1 F Vocanson 1 Michel Langlet 3 O. Dellea 2 C Veillas 1 Stephanie Reynaud 1 Isabelle Verrier 4 Y. Jourlin 1 
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux
3 LMGP - Laboratoire des matériaux et du génie physique
4 Laboratoire Hubert Curien / Eris
LHC - Laboratoire Hubert Curien [Saint Etienne]
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-01314898
Contributor : F Vocanson Connect in order to contact the contributor
Submitted on : Thursday, May 12, 2016 - 12:25:04 PM
Last modification on : Saturday, June 25, 2022 - 9:10:16 PM

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  • HAL Id : ujm-01314898, version 1

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UNIV-ST-ETIENNE | CEA | UNIV-SAVOIE | UGA | CNRS | LMGP | DRT | INC-CNRS | LITEN | CEA-GRE | UDL | INES

Citation

Loic Berthod, O Shavdina, F Vocanson, Michel Langlet, O. Dellea, et al.. Microstructuring and functionalization layers using direct photo-patternable TiO2 sol-gel process and colloidal photolithography. E-MRS 2016 Spring Meeting - symposium AA (Solution processing and properties of functional oxide thin films and nanostructures II), EMRS, May 2016, LILLE, France. ⟨ujm-01314898⟩

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