Microstructuring and functionalization layers using direct photo-patternable TiO2 sol-gel process and colloidal photolithography

Loic Berthod (1) , O Shavdina (2, 1) , F Vocanson (1) , Michel Langlet (3) , O. Dellea (2) , C Veillas (1) , Stephanie Reynaud (1) , Isabelle Verrier (1) , Y. Jourlin (1)

1 LHC - Laboratoire Hubert Curien
2 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux
3 LMGP - Laboratoire des matériaux et du génie physique

Domains: Materials; Optics / Photonic

Loic Berthod, O Shavdina, F Vocanson, Michel Langlet, O. Dellea, et al.. Microstructuring and functionalization layers using direct photo-patternable TiO2 sol-gel process and colloidal photolithography. E-MRS 2016 Spring Meeting - symposium AA (Solution processing and properties of functional oxide thin films and nanostructures II), EMRS, May 2016, LILLE, France. ⟨ujm-01314898⟩