Microstructuring and functionalization layers using direct photo-patternable TiO2 sol-gel process and colloidal photolithography

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https://hal-ujm.archives-ouvertes.fr/ujm-01314898
Contributor : F Vocanson <>
Submitted on : Thursday, May 12, 2016 - 12:25:04 PM
Last modification on : Monday, July 8, 2019 - 11:26:04 AM

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  • HAL Id : ujm-01314898, version 1

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Loic Berthod, O Shavdina, F Vocanson, Michel Langlet, O. Dellea, et al.. Microstructuring and functionalization layers using direct photo-patternable TiO2 sol-gel process and colloidal photolithography. E-MRS 2016 Spring Meeting - symposium AA (Solution processing and properties of functional oxide thin films and nanostructures II), EMRS, May 2016, LILLE, France. ⟨ujm-01314898⟩

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