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Classification of optical signature of patterned structures by neural network

Zaki Sabit Fawzi Philippe 1 Stéphane Robert 1 Bernard Bayard 1 I. El Kalyoubi 2
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 LTM - Laboratoire des technologies de la microélectronique
Keywords : Scatterometry neural network classification
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https://hal-ujm.archives-ouvertes.fr/ujm-01390662
Contributor : Stéphane Robert <>
Submitted on : Wednesday, November 2, 2016 - 11:53:36 AM
Last modification on : Thursday, March 26, 2020 - 9:14:04 AM

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  • HAL Id : ujm-01390662, version 1

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Zaki Sabit Fawzi Philippe, Stéphane Robert, Bernard Bayard, I. El Kalyoubi. Classification of optical signature of patterned structures by neural network. Nice optics 2016, Oct 2016, Nice, France. ⟨ujm-01390662⟩

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