Classification of optical signature of patterned structures by neural network

Zaki Sabit Fawzi Philippe (1) , Stéphane Robert (1) , Bernard Bayard (1) , I. El Kalyoubi (2)

1 LHC - Laboratoire Hubert Curien
2 LTM - Laboratoire des technologies de la microélectronique

Keywords: Scatterometry; neural network; classification

Domains: Optics / Photonic

Zaki Sabit Fawzi Philippe, Stéphane Robert, Bernard Bayard, I. El Kalyoubi. Classification of optical signature of patterned structures by neural network. Nice optics 2016, Oct 2016, Nice, France. ⟨ujm-01390662⟩