Classification of optical signature of patterned structures by neural network

Zaki Sabit Fawzi Philippe; Stéphane Robert; Bernard Bayard; I. El Kalyoubi

Classification of optical signature of patterned structures by neural network

Zaki Sabit Fawzi Philippe ¹ Stéphane Robert ¹ Bernard Bayard ¹ I. El Kalyoubi ²

1 LHC - Laboratoire Hubert Curien [Saint Etienne]

2 LTM - Laboratoire des technologies de la microélectronique

Keywords : Scatterometry neural network classification

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Optics / Photonic

Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-01390662
Contributor : Stéphane Robert <>
Submitted on : Wednesday, November 2, 2016 - 11:53:36 AM
Last modification on : Tuesday, April 2, 2019 - 2:27:33 AM

Classification of optical signature of patterned structures by neural network

Identifiers

Collections

Citation

Export

Metrics

65

Contact

Classification of optical signature of patterned structures by neural network

Identifiers

Collections

Citation

Export

Share

Metrics

65

Contact