Skip to Main content Skip to Navigation
Conference papers

Classification of optical signature of patterned structures by neural network

Zaki Sabit Fawzi Philippe 1 Stéphane Robert 1 Bernard Bayard 1 I. El Kalyoubi 2 
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 LTM - Laboratoire des technologies de la microélectronique
Keywords : Scatterometry neural network classification
Document type :
Conference papers
Complete list of metadata
https://hal-ujm.archives-ouvertes.fr/ujm-01390662
Contributor : Stéphane Robert Connect in order to contact the contributor
Submitted on : Wednesday, November 2, 2016 - 11:53:36 AM
Last modification on : Saturday, June 25, 2022 - 9:10:26 PM

Identifiers

  • HAL Id : ujm-01390662, version 1

Collections

UNIV-ST-ETIENNE | CEA | UGA | CNRS | LTM | LITHOGRAPHY | UDL

Citation

Zaki Sabit Fawzi Philippe, Stéphane Robert, Bernard Bayard, I. El Kalyoubi. Classification of optical signature of patterned structures by neural network. Nice optics 2016, Oct 2016, Nice, France. ⟨ujm-01390662⟩

Export

BibTeX TEI DC DCterms EndNote Datacite

Share

Metrics

Record views

52