Classification of optical signature of patterned structures by neural network

Zaki Sabit Fawzi Philippe; Stéphane Robert; Bernard Bayard; I. El Kalyoubi

Conference papers

Classification of optical signature of patterned structures by neural network

Zaki Sabit Fawzi Philippe ¹ Stéphane Robert ¹ Bernard Bayard ¹ I. El Kalyoubi ²

1 LHC - Laboratoire Hubert Curien [Saint Etienne]

2 LTM - Laboratoire des technologies de la microélectronique

Keywords : Scatterometry neural network classification

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Optics / Photonic

Complete list of metadata

https://hal-ujm.archives-ouvertes.fr/ujm-01390662
Contributor : Stéphane Robert Connect in order to contact the contributor
Submitted on : Wednesday, November 2, 2016 - 11:53:36 AM
Last modification on : Wednesday, November 3, 2021 - 6:44:57 AM

Classification of optical signature of patterned structures by neural network

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Classification of optical signature of patterned structures by neural network

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