Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film

Loic Berthod ¹ AuthorId : 1021626
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Valentin Gâté Gâté ¹ AuthorId : 1153236
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Michel Langlet ² AuthorId : 226695
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Francis Vocanson ¹ AuthorId : 377539
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Carmen Jiménez ² AuthorId : 294139
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Author IdHAL : carmen-jimenez ORCID : https://orcid.org/0000-0002-9601-1825

Damien Jamon ¹ AuthorId : 203131
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Author IdHAL : damien-jamon ORCID : https://orcid.org/0000-0001-5218-0793

I. Verrier ¹ AuthorId : 277291
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Author IdHAL : isabelle-verrier ORCID : https://orcid.org/0000-0002-5764-9674

C. Veillas ¹ AuthorId : 280529
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Olivier Parriaux ¹ AuthorId : 411698
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Yves Jourlin ¹ AuthorId : 384459
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