Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film

Loic Berthod (1) , Valentin Gâté Gâté (1) , Michel Langlet (2) , Francis Vocanson (1) , Carmen Jiménez (2) , Damien Jamon (1) , I. Verrier (1) , C. Veillas (1) , Olivier Parriaux (1) , Yves Jourlin (1)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique

Domaines: Matériaux; Optique / photonique

Loic Berthod, Valentin Gâté Gâté, Michel Langlet, Francis Vocanson, Carmen Jiménez, et al.. Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film. European Optical Society Annual Meeting (EOSAM), Sep 2016, VIENNE, Austria. ⟨ujm-01469405⟩