Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film

Loic Berthod 1 Valentin Gâté 1 Michel Langlet 2 Francis Vocanson 1 Carmen Jiménez 2 Damien Jamon 1 I. Verrier 1 C. Veillas 1 Olivier Parriaux 1 Yves Jourlin 1
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 LMGP - Laboratoire des matériaux et du génie physique
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-01469405
Contributor : Francis Vocanson <>
Submitted on : Thursday, February 16, 2017 - 2:19:49 PM
Last modification on : Monday, October 14, 2019 - 5:30:02 PM

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  • HAL Id : ujm-01469405, version 1

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UNIV-ST-ETIENNE | LMGP | INC-CNRS | UGA | LAHC | IOGS | PARISTECH | UNIV-PARIS-SACLAY

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Loic Berthod, Valentin Gâté, Michel Langlet, Francis Vocanson, Carmen Jiménez, et al.. Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film. European Optical Society Annual Meeting (EOSAM), Sep 2016, VIENNE, Austria. ⟨ujm-01469405⟩

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