Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film - Archive ouverte HAL Access content directly
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Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film

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ujm-01469405 , version 1 (16-02-2017)

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  • HAL Id : ujm-01469405 , version 1

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Loic Berthod, Valentin Gâté Gâté, Michel Langlet, Francis Vocanson, Carmen Jiménez, et al.. Demonstration of a metal-like TiN plasmonic grating by ammonolysis of a photo-patternable TiO2 sol-gel film. European Optical Society Annual Meeting (EOSAM), Sep 2016, VIENNE, Austria. ⟨ujm-01469405⟩
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