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Analysis and detection of an incorrect profile shape in a classical scatterometric process

Zaki Sabit Fawzi Philippe 1 Stéphane Robert 1 I. El Kalyoubi 2 Bernard Bayard 1
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 LTM - Laboratoire des technologies de la microélectronique
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https://hal-ujm.archives-ouvertes.fr/ujm-01478244
Contributor : Bernard Bayard <>
Submitted on : Tuesday, February 28, 2017 - 8:07:04 AM
Last modification on : Tuesday, October 6, 2020 - 4:30:03 PM

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UNIV-ST-ETIENNE | CNRS | LTM | UGA | LAHC | PARISTECH | UNIV-PARIS-SACLAY | LITHOGRAPHY | CEA | IOGS | UDL

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Zaki Sabit Fawzi Philippe, Stéphane Robert, I. El Kalyoubi, Bernard Bayard. Analysis and detection of an incorrect profile shape in a classical scatterometric process. European Physical Journal: Applied Physics, EDP Sciences, 2016, 76 (3), ⟨10.1051/epjap/2016160157⟩. ⟨ujm-01478244⟩

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