Skip to Main content Skip to Navigation
Journal articles

Analysis and detection of an incorrect profile shape in a classical scatterometric process

Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-01478244
Contributor : Bernard Bayard <>
Submitted on : Tuesday, February 28, 2017 - 8:07:04 AM
Last modification on : Thursday, March 26, 2020 - 9:14:04 AM

Links full text

Identifiers

Citation

Zaki Sabit Fawzi Philippe, Stéphane Robert, I. El Kalyoubi, Bernard Bayard. Analysis and detection of an incorrect profile shape in a classical scatterometric process. European Physical Journal: Applied Physics, EDP Sciences, 2016, 76 (3), ⟨10.1051/epjap/2016160157⟩. ⟨ujm-01478244⟩

Share

Metrics

Record views

274