Analysis and detection of an incorrect profile shape in a classical scatterometric process

Zaki Sabit Fawzi Philippe; Stéphane Robert; I. El Kalyoubi; Bernard Bayard

doi:10.1051/epjap/2016160157

Journal Articles European Physical Journal: Applied Physics Year : 2016

Analysis and detection of an incorrect profile shape in a classical scatterometric process

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1
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Zaki Sabit Fawzi Philippe

Function : Author

Laboratoire Hubert Curien

Stéphane Robert

Function : Author
PersonId : 10263
IdHAL : stephane-robert
IdRef : 077187717

Laboratoire Hubert Curien

I. El Kalyoubi

Function : Author

Laboratoire des technologies de la microélectronique

Bernard Bayard

Function : Author
PersonId : 10187
IdHAL : bernard-bayard-univ-st-etienne-fr
ORCID : 0000-0002-7294-8226
IdRef : 060454253

Laboratoire Hubert Curien

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Engineering Sciences [physics] Electromagnetism

Bernard Bayard : Connect in order to contact the contributor

https://hal-ujm.archives-ouvertes.fr/ujm-01478244

Submitted on : Tuesday, February 28, 2017-8:07:04 AM

Last modification on : Friday, March 24, 2023-2:53:04 PM

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ujm-01478244 , version 1 (28-02-2017)

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HAL Id : ujm-01478244 , version 1
DOI : 10.1051/epjap/2016160157

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Zaki Sabit Fawzi Philippe, Stéphane Robert, I. El Kalyoubi, Bernard Bayard. Analysis and detection of an incorrect profile shape in a classical scatterometric process. European Physical Journal: Applied Physics, 2016, 76 (3), ⟨10.1051/epjap/2016160157⟩. ⟨ujm-01478244⟩

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Analysis and detection of an incorrect profile shape in a classical scatterometric process

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