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Analysis and detection of an incorrect profile shape in a classical scatterometric process

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https://hal-ujm.archives-ouvertes.fr/ujm-01478244
Contributor : Bernard Bayard Connect in order to contact the contributor
Submitted on : Tuesday, February 28, 2017 - 8:07:04 AM
Last modification on : Saturday, June 25, 2022 - 9:10:35 PM

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Zaki Sabit Fawzi Philippe, Stéphane Robert, I. El Kalyoubi, Bernard Bayard. Analysis and detection of an incorrect profile shape in a classical scatterometric process. European Physical Journal: Applied Physics, 2016, 76 (3), ⟨10.1051/epjap/2016160157⟩. ⟨ujm-01478244⟩

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