Zaki Sabit Fawzi Philippe, Stéphane Robert, I. El Kalyoubi, Bernard Bayard. Analysis and detection of an incorrect profile shape in a classical scatterometric process.
European Physical Journal: Applied Physics, EDP Sciences, 2016, 76 (3),
⟨10.1051/epjap/2016160157⟩.
⟨ujm-01478244⟩