Analysis and detection of an incorrect profile shape in a classical scatterometric process

Zaki Sabit Fawzi Philippe; Stéphane Robert; I. El Kalyoubi; Bernard Bayard

doi:10.1051/epjap/2016160157

Journal articles

Analysis and detection of an incorrect profile shape in a classical scatterometric process

Zaki Sabit Fawzi Philippe ¹ Stéphane Robert ¹ I. El Kalyoubi ² Bernard Bayard ¹

1 LHC - Laboratoire Hubert Curien [Saint Etienne]

2 LTM - Laboratoire des technologies de la microélectronique

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Electromagnetism

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https://hal-ujm.archives-ouvertes.fr/ujm-01478244
Contributor : Bernard Bayard Connect in order to contact the contributor
Submitted on : Tuesday, February 28, 2017 - 8:07:04 AM
Last modification on : Saturday, June 25, 2022 - 9:10:35 PM

Analysis and detection of an incorrect profile shape in a classical scatterometric process

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Analysis and detection of an incorrect profile shape in a classical scatterometric process

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