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Journal Articles European Physical Journal: Applied Physics Year : 2016

Analysis and detection of an incorrect profile shape in a classical scatterometric process

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ujm-01478244 , version 1 (28-02-2017)

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Zaki Sabit Fawzi Philippe, Stéphane Robert, I. El Kalyoubi, Bernard Bayard. Analysis and detection of an incorrect profile shape in a classical scatterometric process. European Physical Journal: Applied Physics, 2016, 76 (3), ⟨10.1051/epjap/2016160157⟩. ⟨ujm-01478244⟩
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