Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel

Loic Berthod; O Shavdina; Francis Vocanson; Michel Langlet; O. Dellea; C Veillas; Isabelle Verrier; Y. Jourlin; Stephanie Reynaud

Journal articles

Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel

Loic Berthod ^{1, 2} O Shavdina ^{3, 1} Francis Vocanson ^{1, 4} Michel Langlet ² O. Dellea ³ C Veillas ¹ Isabelle Verrier ¹ Y. Jourlin ^{1, *} Stephanie Reynaud ¹

* Corresponding author

1 LHC - Laboratoire Hubert Curien [Saint Etienne]

2 LMGP - Laboratoire des matériaux et du génie physique

3 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux

4 Université de Lyon

Document type :

Journal articles

Domain :

Chemical Sciences / Material chemistry

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Engineering Sciences [physics] / Optics / Photonic

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https://hal-ujm.archives-ouvertes.fr/ujm-01514973
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Submitted on : Wednesday, April 26, 2017 - 6:41:51 PM
Last modification on : Saturday, June 25, 2022 - 9:10:38 PM

Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel

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Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel

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