Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel

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https://hal-ujm.archives-ouvertes.fr/ujm-01514973
Contributor : F Vocanson <>
Submitted on : Wednesday, April 26, 2017 - 6:41:51 PM
Last modification on : Tuesday, July 23, 2019 - 11:16:04 AM

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  • HAL Id : ujm-01514973, version 1

Citation

Loic Berthod, O Shavdina, Francis Vocanson, Michel Langlet, O. Dellea, et al.. Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel. Microelectronic Engineering, Elsevier, 2017, 177, pp.46. ⟨ujm-01514973⟩

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