Journal Articles
Microelectronic Engineering
Year : 2017
F Vocanson : Connect in order to contact the contributor
https://hal-ujm.archives-ouvertes.fr/ujm-01514973
Submitted on : Wednesday, April 26, 2017-6:41:51 PM
Last modification on : Friday, March 24, 2023-2:53:04 PM
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- HAL Id : ujm-01514973 , version 1
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Loic Berthod, O Shavdina, Francis Vocanson, Michel Langlet, O. Dellea, et al.. Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel. Microelectronic Engineering, 2017, 177, pp.46. ⟨ujm-01514973⟩
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