Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel

Loic Berthod (1, 2) , O Shavdina (3, 1) , Francis Vocanson (1, 4) , Michel Langlet (2) , O. Dellea (3) , C Veillas (1) , Isabelle Verrier (1) , Y. Jourlin (1) , Stephanie Reynaud (1)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique
3 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux
4 Université de Lyon

Domains: Chemical Sciences; Material chemistry; Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics; Engineering Sciences [physics]; Optics / Photonic

Loic Berthod, O Shavdina, Francis Vocanson, Michel Langlet, O. Dellea, et al.. Colloidal photolithography applied to functional microstructure on cylinder based on photopatternable TiO2 sol-gel. Microelectronic Engineering, 2017, 177, pp.46. ⟨ujm-01514973⟩