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Université Jean Monnet – Saint-Etienne |  |
Journal articles
Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse
Abstract : Single-shot Gaussian-Bessel laser beams of 1 ps pulse duration and of ~ 0.9 μm core size and ~ 60 μm depth of focus are used for drilling micro-channels on front side of fused silica in ambient condition. Channels ablated at different pulse energies are fully characterized by AFM and post-processing polishing procedures. We identify experimental energy conditions (typically 1.5 µJ) suitable to fabricate non-tapered channels with mean diameter of ~ 1.2 µm and length of ~ 40 μm while maintaining an utmost quality of the front opening of the channels. In addition, by further applying accurate post-polishing procedure, channels with high surface quality and moderate aspect ratio down to a few units are accessible, which would find interest in the surface micro-structuring of materials, with perspective of further scalability to meta-material specifications.
Cited literature [16 references]
https://hal-ujm.archives-ouvertes.fr/ujm-01823403
Contributor : Razvan Stoian <>
Submitted on : Thursday, May 23, 2019 - 5:09:18 PM
Last modification on : Monday, March 29, 2021 - 3:14:13 PM
Contributor : Razvan Stoian <>
Submitted on : Thursday, May 23, 2019 - 5:09:18 PM
Last modification on : Monday, March 29, 2021 - 3:14:13 PM
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Liu2018_Article_Front-surfaceF...
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