Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

Xin Liu 1, 2, 3 Nicolas Sanner 2 Marc Sentis 2 Razvan Stoian 4 Wei Zhao 1 Guanghua Cheng 1 Olivier Uteza 2
1 Xi’an Institute of Optics and Precision Mechanics
2 LP3 - Laboratoire Lasers, Plasmas et Procédés photoniques
3 UCAS - University of Chinese Academy of Sciences [Beijing]
4 LHC - Laboratoire Hubert Curien [Saint Etienne]
Abstract : Single-shot Gaussian-Bessel laser beams of 1 ps pulse duration and of ~ 0.9 μm core size and ~ 60 μm depth of focus are used for drilling micro-channels on front side of fused silica in ambient condition. Channels ablated at different pulse energies are fully characterized by AFM and post-processing polishing procedures. We identify experimental energy conditions (typically 1.5 µJ) suitable to fabricate non-tapered channels with mean diameter of ~ 1.2 µm and length of ~ 40 μm while maintaining an utmost quality of the front opening of the channels. In addition, by further applying accurate post-polishing procedure, channels with high surface quality and moderate aspect ratio down to a few units are accessible, which would find interest in the surface micro-structuring of materials, with perspective of further scalability to meta-material specifications.
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UNIV-ST-ETIENNE | IOGS | CNRS | UNIV-AMU | PARISTECH | UNIV-PARIS-SACLAY | LP3

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Xin Liu, Nicolas Sanner, Marc Sentis, Razvan Stoian, Wei Zhao, et al.. Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse. Applied physics. A, Materials science & processing, Springer Verlag, 2018, 124 (2), pp.206. ⟨10.1007/s00339-018-1634-1⟩. ⟨ujm-01823403⟩

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