Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

Xin Liu; Nicolas Sanner; Marc Sentis; Razvan Stoian; Wei Zhao; Guanghua Cheng; Olivier Uteza

Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

Xin Liu ^{1, 2, 3} Nicolas Sanner ² Marc Sentis ² Razvan Stoian ⁴ Wei Zhao ¹ Guanghua Cheng ¹ Olivier Uteza ²

1 Xi’an Institute of Optics and Precision Mechanics

2 LP3 - Laboratoire Lasers, Plasmas et Procédés photoniques

3 UCAS - University of Chinese Academy of Sciences [Beijing]

4 LHC - Laboratoire Hubert Curien [Saint Etienne]

Abstract : Single-shot Gaussian-Bessel laser beams of 1 ps pulse duration and of ~ 0.9 μm core size and ~ 60 μm depth of focus are used for drilling micro-channels on front side of fused silica in ambient condition. Channels ablated at different pulse energies are fully characterized by AFM and post-processing polishing procedures. We identify experimental energy conditions (typically 1.5 µJ) suitable to fabricate non-tapered channels with mean diameter of ~ 1.2 µm and length of ~ 40 μm while maintaining an utmost quality of the front opening of the channels. In addition, by further applying accurate post-polishing procedure, channels with high surface quality and moderate aspect ratio down to a few units are accessible, which would find interest in the surface micro-structuring of materials, with perspective of further scalability to meta-material specifications.

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Optics / Photonic

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https://hal-ujm.archives-ouvertes.fr/ujm-01823403
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Submitted on : Thursday, May 23, 2019 - 5:09:18 PM
Last modification on : Friday, August 30, 2019 - 1:14:14 AM

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Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

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Front-surface fabrication of moderate aspect ratio micro-channels in fused silica by single picosecond Gaussian–Bessel laser pulse

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