Direct UV micro-structuring process of dielectric TiO2 and metallic TiOxNy from sol-gel layers

Francis Vocanson (1) , N Crespo-Monteiro (1) , Michel Langlet (2) , Loic Berthod (1) , Olivier Dellea (3) , C Veillas (1) , T. Kämpfe (1) , Isabelle Verrier (1) , Yves Jourlin (1)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique
3 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux

Domains: Chemical Sciences; Material chemistry; Engineering Sciences [physics]; Optics / Photonic

Francis Vocanson, N Crespo-Monteiro, Michel Langlet, Loic Berthod, Olivier Dellea, et al.. Direct UV micro-structuring process of dielectric TiO2 and metallic TiOxNy from sol-gel layers. E-MRS 2018, Spring Meeting, symposium P, Solution processing and properties of functional oxide thin films and nanostructures III, Jun 2018, Strasbourg, France. ⟨ujm-01919794⟩