Microstructuring of a cylinder by colloidal photolithography on functional TiO2 sol-gel. - Archive ouverte HAL Access content directly
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Microstructuring of a cylinder by colloidal photolithography on functional TiO2 sol-gel.

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Chemical Sciences Material chemistry Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

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https://hal-ujm.archives-ouvertes.fr/ujm-01919812

Submitted on : Monday, November 12, 2018-5:11:12 PM

Last modification on : Friday, March 24, 2023-2:53:08 PM

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ujm-01919812 , version 1 (12-11-2018)

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  • HAL Id : ujm-01919812 , version 1

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Erieta-K. Koussi, L. Berthod, O Shavdina, I. Verrier, C. Veillas, et al.. Microstructuring of a cylinder by colloidal photolithography on functional TiO2 sol-gel.. Journées Nationales sur les Technologies Emergentes en micronanofabrication, JNTE 2017, Nov 2017, Orléans, France. ⟨ujm-01919812⟩

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