Total Ionizing Dose Effects on a Radiation-Hardened CMOS Image Sensor Demonstrator for ITER Remote Handling

Vincent Goiffon 1 Serena Rizzolo 1 Franck Corbière 1 Sébastien Rolando 1 Said Bounasser 1 Marius Sergent 1 Aziouz Chabane 1 Olivier Marcelot 1 Magali Estribeau 1 Pierre Magnan 1 Philippe Paillet 2 Sylvain Girard 3 Marc Gaillardin 2 Marc Marcandella 2 Timothé Allanche 3 Marc van Uffelen 4 Laura Mont Casellas 4 Robin Scott 5 Wouter de Cock 6
1 DEOS - Département Electronique, Optronique et Signal
2 DAM/DIF - DAM Île-de-France
3 LHC - Laboratoire Hubert Curien [Saint Etienne]
4 F4E - Fusion for Energy
5 Oxford Technologies Ltd. (OTL)
6 SCK-CEN - Centre d'Etude de l'Energie Nucléaire
Abstract : Total ionizing dose effects are studied on a radiation hardened by design (RHBD) 256×256 -pixel CMOS image sensor (CIS) demonstrator developed for ITER remote handling by using X- and γ -ray irradiations. The (color) imaging capabilities of the RHBD CIS are demonstrated up to 10 MGy (SiO2), 1 Grad (SiO2), validating the radiation hardness of most of the designed integrated circuit. No significant sensitivity (i.e., responsivity and color filter transmittance) or readout noise degradation is observed. The proposed readout chain architecture allows achieving a maximum output voltage swing larger than 1 V at 10 MGy (SiO2). The influence of several pixel layout (the gate oxide thickness, the gate overlap distance, and the use of an in-pixel P+ ring) and manufacturing process parameters (photodiode doping profile and process variation) on the radiation-induced dark current increase is studied. The nature of the dark current draining mechanism used to cancel most of the radiation-induced degradation is also discussed and clarified.
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Journal articles
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https://hal-ujm.archives-ouvertes.fr/ujm-01964819
Contributor : Sylvain Girard <>
Submitted on : Sunday, December 23, 2018 - 8:42:09 PM
Last modification on : Tuesday, December 25, 2018 - 1:09:29 AM

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UNIV-ST-ETIENNE | IOGS | CEA | DAM | PARISTECH | UNIV-PARIS-SACLAY

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Vincent Goiffon, Serena Rizzolo, Franck Corbière, Sébastien Rolando, Said Bounasser, et al.. Total Ionizing Dose Effects on a Radiation-Hardened CMOS Image Sensor Demonstrator for ITER Remote Handling. IEEE Transactions on Nuclear Science, Institute of Electrical and Electronics Engineers, 2018, 65 (1), pp.101-110. ⟨10.1109/TNS.2017.2765481⟩. ⟨ujm-01964819⟩

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