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Characterization of optical diffraction gratings by use of a neural method

Abstract : Optical scatterometry by use of a neural network is now recognized as an efficient method for retrieving dimensions of gratings in semiconductors or glasses. For an on-line control, a small number of measurements and a rapid data treatment are needed. We demonstrate that these requirements can be met by combining data preprocessing and a proper neural learning method. A good accuracy is attainable with the measurement of only a few orders, even in the presence of experimental errors, with a reduction in learning and computing time.
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Contributor : Stéphane Robert Connect in order to contact the contributor
Submitted on : Wednesday, September 8, 2021 - 3:15:08 PM
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Stéphane Robert, Alain Mure-Ravaud, Dominique Lacour. Characterization of optical diffraction gratings by use of a neural method. Journal of the Optical Society of America. A Optics, Image Science, and Vision, Optical Society of America, 2002, 19 (1), pp.24-32. ⟨10.1364/JOSAA.19.000024⟩. ⟨ujm-02060281⟩



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