Characterization of optical diffraction gratings by use of a neural method - Université Jean-Monnet-Saint-Étienne Accéder directement au contenu
Article Dans Une Revue Journal of the Optical Society of America. A Optics, Image Science, and Vision Année : 2002

Characterization of optical diffraction gratings by use of a neural method

Stéphane Robert
Dominique Lacour
  • Fonction : Auteur

Résumé

Optical scatterometry by use of a neural network is now recognized as an efficient method for retrieving dimensions of gratings in semiconductors or glasses. For an on-line control, a small number of measurements and a rapid data treatment are needed. We demonstrate that these requirements can be met by combining data preprocessing and a proper neural learning method. A good accuracy is attainable with the measurement of only a few orders, even in the presence of experimental errors, with a reduction in learning and computing time.
Fichier principal
Vignette du fichier
Robert2002.pdf (233.03 Ko) Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)

Dates et versions

ujm-02060281 , version 1 (08-09-2021)

Licence

Paternité

Identifiants

Citer

Stéphane Robert, Alain Mure-Ravaud, Dominique Lacour. Characterization of optical diffraction gratings by use of a neural method. Journal of the Optical Society of America. A Optics, Image Science, and Vision, 2002, 19 (1), pp.24-32. ⟨10.1364/JOSAA.19.000024⟩. ⟨ujm-02060281⟩
42 Consultations
55 Téléchargements

Altmetric

Partager

Gmail Facebook X LinkedIn More