Characterization of optical diffraction gratings by use of a neural method

Stéphane Robert (1) , Alain Mure-Ravaud (1) , Dominique Lacour (2)

1 LHC - Laboratoire Hubert Curien
2 IP - Institut Pascal

Optical scatterometry by use of a neural network is now recognized as an efficient method for retrieving dimensions of gratings in semiconductors or glasses. For an on-line control, a small number of measurements and a rapid data treatment are needed. We demonstrate that these requirements can be met by combining data preprocessing and a proper neural learning method. A good accuracy is attainable with the measurement of only a few orders, even in the presence of experimental errors, with a reduction in learning and computing time.

Domains: Optics / Photonic

Stéphane Robert, Alain Mure-Ravaud, Dominique Lacour. Characterization of optical diffraction gratings by use of a neural method. Journal of the Optical Society of America. A Optics, Image Science, and Vision, 2002, 19 (1), pp.24-32. ⟨10.1364/JOSAA.19.000024⟩. ⟨ujm-02060281⟩