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Université Jean Monnet – Saint-Etienne |  |
Journal articles
Characterization of optical diffraction gratings by use of a neural method
Abstract : Optical scatterometry by use of a neural network is now recognized as an efficient method for retrieving dimensions of gratings in semiconductors or glasses. For an on-line control, a small number of measurements and a rapid data treatment are needed. We demonstrate that these requirements can be met by combining data preprocessing and a proper neural learning method. A good accuracy is attainable with the measurement of only a few orders, even in the presence of experimental errors, with a reduction in learning and computing time.
https://hal-ujm.archives-ouvertes.fr/ujm-02060281
Contributor : Stéphane Robert <>
Submitted on : Wednesday, September 8, 2021 - 3:15:08 PM
Last modification on : Friday, September 10, 2021 - 3:09:47 AM
Contributor : Stéphane Robert <>
Submitted on : Wednesday, September 8, 2021 - 3:15:08 PM
Last modification on : Friday, September 10, 2021 - 3:09:47 AM
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Robert2002.pdf
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Distributed under a Creative Commons Attribution 4.0 International License