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Journal Articles Journal of the Optical Society of America. A Optics, Image Science, and Vision Year : 2002

Characterization of optical diffraction gratings by use of a neural method

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Abstract

Optical scatterometry by use of a neural network is now recognized as an efficient method for retrieving dimensions of gratings in semiconductors or glasses. For an on-line control, a small number of measurements and a rapid data treatment are needed. We demonstrate that these requirements can be met by combining data preprocessing and a proper neural learning method. A good accuracy is attainable with the measurement of only a few orders, even in the presence of experimental errors, with a reduction in learning and computing time.
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Dates and versions

ujm-02060281 , version 1 (08-09-2021)

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Attribution - CC BY 4.0

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Stéphane Robert, Alain Mure-Ravaud, Dominique Lacour. Characterization of optical diffraction gratings by use of a neural method. Journal of the Optical Society of America. A Optics, Image Science, and Vision, 2002, 19 (1), pp.24-32. ⟨10.1364/JOSAA.19.000024⟩. ⟨ujm-02060281⟩
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