https://hal-ujm.archives-ouvertes.fr/ujm-02060344
Contributor : Stéphane Robert
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Submitted on : Thursday, March 7, 2019 - 12:42:50 PM
Last modification on : Tuesday, April 2, 2019 - 2:55:56 AM
Stéphane Robert, A. Mure-Ravaud. Optical control of the homogeneity of a silicon grating. Rencontres Internationales des Micro et Nanotechnologies MINATEC2003, Jun 2003, Grenoble, France. ⟨ujm-02060344⟩
