https://hal-ujm.archives-ouvertes.fr/ujm-02060344 Contributor : Stéphane RobertConnect in order to contact the contributor Submitted on : Thursday, March 7, 2019 - 12:42:50 PM Last modification on : Saturday, June 25, 2022 - 7:27:12 PM
Stéphane Robert, A. Mure-Ravaud. Optical control of the homogeneity of a silicon grating. Rencontres Internationales des Micro et Nanotechnologies MINATEC2003, Jun 2003, Grenoble, France. ⟨ujm-02060344⟩