Optical control of the homogeneity of a silicon grating

Stéphane Robert 1 A. Mure-Ravaud 1
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-02060344
Contributor : Stéphane Robert <>
Submitted on : Thursday, March 7, 2019 - 12:42:50 PM
Last modification on : Wednesday, November 20, 2019 - 2:50:13 AM

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  • HAL Id : ujm-02060344, version 1

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UNIV-ST-ETIENNE | CNRS | IOGS | PARISTECH | UDL

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Stéphane Robert, A. Mure-Ravaud. Optical control of the homogeneity of a silicon grating. Rencontres Internationales des Micro et Nanotechnologies MINATEC2003, Jun 2003, Grenoble, France. ⟨ujm-02060344⟩

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