https://hal-ujm.archives-ouvertes.fr/ujm-02060344
Contributor : Stéphane Robert <>
Submitted on : Thursday, March 7, 2019 - 12:42:50 PM Last modification on : Monday, January 13, 2020 - 5:46:07 PM
Stéphane Robert, A. Mure-Ravaud. Optical control of the homogeneity of a silicon grating. Rencontres Internationales des Micro et Nanotechnologies MINATEC2003, Jun 2003, Grenoble, France. ⟨ujm-02060344⟩