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https://hal-ujm.archives-ouvertes.fr/ujm-02060344
Submitted on : Thursday, March 7, 2019-12:42:50 PM
Last modification on : Friday, March 24, 2023-2:53:10 PM
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- HAL Id : ujm-02060344 , version 1
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Stéphane Robert, A. Mure-Ravaud. Optical control of the homogeneity of a silicon grating. Rencontres Internationales des Micro et Nanotechnologies MINATEC2003, Jun 2003, Grenoble, France. ⟨ujm-02060344⟩
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