Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology

Moustapha Godi Tchéré; Stéphane Robert; Zaki Sabit Fawzi; Bernard Bayard

doi:10.1364/AO.58.006118

Journal articles

Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology

Moustapha Godi Tchéré ¹ Stéphane Robert ¹ Zaki Sabit Fawzi ¹ Bernard Bayard ¹

1 LHC - Laboratoire Hubert Curien [Saint Etienne]

Document type :

Journal articles

Domain :

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Engineering Sciences [physics] / Optics / Photonic

Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-02273103
Contributor : Bernard Bayard <>
Submitted on : Wednesday, August 28, 2019 - 2:54:52 PM
Last modification on : Monday, January 13, 2020 - 5:46:07 PM

Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology

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Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology

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