Journal Articles
Applied optics
Year : 2019
Bernard Bayard : Connect in order to contact the contributor
https://hal-ujm.archives-ouvertes.fr/ujm-02273103
Submitted on : Wednesday, August 28, 2019-2:54:52 PM
Last modification on : Friday, March 24, 2023-2:53:12 PM
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Moustapha Godi Tchéré, Stéphane Robert, Zaki Sabit Fawzi, Bernard Bayard. Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology. Applied optics, 2019, 58 (22), pp.6118. ⟨10.1364/AO.58.006118⟩. ⟨ujm-02273103⟩
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