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Journal Articles Applied optics Year : 2019

Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology

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ujm-02273103 , version 1 (28-08-2019)

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Moustapha Godi Tchéré, Stéphane Robert, Zaki Sabit Fawzi, Bernard Bayard. Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology. Applied optics, 2019, 58 (22), pp.6118. ⟨10.1364/AO.58.006118⟩. ⟨ujm-02273103⟩
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