Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology

Moustapha Godi Tchéré 1 Stéphane Robert 1 Zaki Sabit Fawzi 1 Bernard Bayard 1
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
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Journal articles
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https://hal-ujm.archives-ouvertes.fr/ujm-02273103
Contributor : Bernard Bayard <>
Submitted on : Wednesday, August 28, 2019 - 2:54:52 PM
Last modification on : Wednesday, September 4, 2019 - 11:19:05 AM

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UNIV-ST-ETIENNE | IOGS | PARISTECH | UNIV-PARIS-SACLAY

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Moustapha Godi Tchéré, Stéphane Robert, Zaki Sabit Fawzi, Bernard Bayard. Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology. Applied optics, Optical Society of America, 2019, 58 (22), pp.6118. ⟨10.1364/AO.58.006118⟩. ⟨ujm-02273103⟩

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