Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology

Moustapha Godi Tchéré; Stéphane Robert; Zaki Sabit Fawzi; Bernard Bayard

doi:10.1364/AO.58.006118

Journal Articles Applied optics Year : 2019

Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology

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1

Moustapha Godi Tchéré

Function : Author

Laboratoire Hubert Curien

Stéphane Robert

Function : Author
PersonId : 10263
IdHAL : stephane-robert
IdRef : 077187717

Laboratoire Hubert Curien

Zaki Sabit Fawzi

Function : Author

Laboratoire Hubert Curien

Bernard Bayard

Function : Author
PersonId : 10187
IdHAL : bernard-bayard-univ-st-etienne-fr
ORCID : 0000-0002-7294-8226
IdRef : 060454253

Laboratoire Hubert Curien

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Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics Engineering Sciences [physics] Optics / Photonic

Bernard Bayard : Connect in order to contact the contributor

https://hal-ujm.archives-ouvertes.fr/ujm-02273103

Submitted on : Wednesday, August 28, 2019-2:54:52 PM

Last modification on : Friday, March 24, 2023-2:53:12 PM

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ujm-02273103 , version 1 (28-08-2019)

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HAL Id : ujm-02273103 , version 1
DOI : 10.1364/AO.58.006118

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Moustapha Godi Tchéré, Stéphane Robert, Zaki Sabit Fawzi, Bernard Bayard. Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology. Applied optics, 2019, 58 (22), pp.6118. ⟨10.1364/AO.58.006118⟩. ⟨ujm-02273103⟩

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Reconstruction of a complex profile shape by weighting basic characterization results for nanometrology

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