P. Russbueldt, T. Mans, and G. Rotarius, 400 W Yb: YAGInnoslab fs-amplifier, Opt Express, vol.17, pp.12230-12245, 2009.

K. Sugioka and Y. Cheng, Ultrafast lasers?reliable tools for advanced materials processing, Light: Science & Applications, vol.3, issue.4, pp.e149-e149, 2014.

M. Malinauskas, A. ?ukauskas, S. Hasegawa, Y. Hayasaki, V. Mizeikis et al., Ultrafast laser processing of materials: from science to industry, Light: Science & Applications, vol.5, issue.8, pp.e16133-e16133, 2016.

R. Poprawe, C. Hinke, W. Meiners, F. Eibl, O. Zarei et al., Digital photonic production along the lines of industry 4.0, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXIII, p.1051907, 2018.

A. E. Lawson and H. , Flora of the Bristol coal-field. Edited (for the Bristol Naturalists' Society) by James Walter White ..., Proceedings of the Bristol Naturalists' Society. Translated by Fripp HE, vol.1, pp.200-261, 1881.

D. Ashkenasi, A. Rosenfeld, H. Varel, M. Wähmer, and E. E. Campbell, Laser processing of sapphire with picosecond and sub-picosecond pulses, Applied Surface Science, vol.120, issue.1-2, pp.65-80, 1997.

A. P. Joglekar, H. Liu, E. Meyhofer, G. Mourou, and A. J. Hunt, Optics at critical intensity: Applications to nanomorphing, Proceedings of the National Academy of Sciences, vol.101, issue.16, pp.5856-5861, 2004.

F. Korte, J. Serbin, J. Koch, A. Egbert, C. Fallnich et al., Towards nanostructuring with femtosecond laser pulses, Applied Physics A, vol.77, issue.2, pp.229-235, 2003.

J. H. Klein-wiele and P. Simon, Sub-wavelength pattern generation by laser direct writing via repeated irradiation, Optics Express, vol.21, issue.1, p.626, 2013.

F. Qin, K. Huang, J. Wu, J. Teng, C. Qiu et al., A Supercritical Lens Optical Label-Free Microscopy: Sub-Diffraction Resolution and Ultra-Long Working Distance, Advanced Materials, vol.29, issue.8, p.1602721, 2016.

K. Mishchik, Y. Petit, E. Brasselet, A. Royon, T. Cardinal et al., Patterning linear and nonlinear optical properties of photosensitive glasses by femtosecond structured light, Optics Letters, vol.40, issue.2, p.201, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01104961

F. Korte, S. Nolte, B. N. Chichkov, T. Bauer, G. Kamlage et al., Far-field and near-field material processing with. femtosecond laser pulses, Applied Physics A Materials Science & Processing, vol.69, issue.S1, pp.S7-S11, 1999.

A. Chimmalgi, T. Y. Choi, C. P. Grigoropoulos, and K. Komvopoulos, Femtosecond laser aperturless near-field nanomachining of metals assisted by scanning probe microscopy, Applied Physics Letters, vol.82, issue.8, pp.1146-1148, 2003.

F. Casas, I. Kautek, and W. , Subwavelength nanostructuring of gold films by apertureless scanning probe lithography assisted by a femtosecond fiber laser oscillator, Nanomat, vol.8, p.536, 2018.

K. Piglmayer, R. Denk, and D. Bäuerle, Laser-induced surface patterning by means of microspheres, Applied Physics Letters, vol.80, issue.25, pp.4693-4695, 2002.

M. Ulmeanu, P. Petkov, D. Ursescu, V. A. Maraloiu, F. Jipa et al., Pattern formation on silicon by laser-initiated liquid-assisted colloidal lithography, Nanotechnology, vol.26, issue.45, p.455303, 2015.

Y. V. White, X. Li, Z. Sikorski, L. M. Davis, and W. Hofmeister, Single-pulse ultrafast-laser machining of high aspect nano-holes at the surface of SiO_2, Optics Express, vol.16, issue.19, p.14411, 2008.

L. Englert, B. Rethfeld, L. Haag, M. Wollenhaupt, C. Sarpe-tudoran et al., Control of ionization processes in high band gap materials via tailored femtosecond pulses, Optics Express, vol.15, issue.26, p.17855, 2007.

A. Rudenko, J. P. Colombier, S. Höhm, A. Rosenfeld, J. Krüger et al., Spontaneous periodic ordering on the surface and in the bulk of dielectrics irradiated by ultrafast laser: a shared electromagnetic origin, Scientific Reports, vol.7, issue.1, p.12306, 2017.
URL : https://hal.archives-ouvertes.fr/ujm-01616533

Y. Shimotsuma, P. G. Kazansky, J. Qiu, and K. Hirao, Self-Organized Nanogratings in Glass Irradiated by Ultrashort Light Pulses, Physical Review Letters, vol.91, issue.24, p.247405, 2003.

M. J. Abere, M. Zhong, J. Krüger, and J. Bonse, Ultrafast laser-induced morphological transformations, MRS Bulletin, vol.41, issue.12, pp.969-974, 2016.

M. Birnbaum, Semiconductor Surface Damage Produced by Ruby Lasers, Journal of Applied Physics, vol.36, issue.11, pp.3688-3689, 1965.

E. Skoulas, A. Manousaki, C. Fotakis, and E. Stratakis, Biomimetic surface structuring using cylindrical vector femtosecond laser beams, Scientific Reports, vol.7, issue.1, p.45114, 2017.

B. Dusser, Z. Sagan, H. Soder, N. Faure, J. P. Colombier et al., Controlled nanostructrures formation by ultra fast laser pulses for color marking, Optics Express, vol.18, issue.3, p.2913, 2010.
URL : https://hal.archives-ouvertes.fr/ujm-00501510

A. Y. Vorobyev and C. Guo, Metal pumps liquid uphill, Applied Physics Letters, vol.94, issue.22, p.224102, 2009.

G. Cheng, K. Mishchik, C. Mauclair, E. Audouard, and R. Stoian, Ultrafast laser photoinscription of polarization sensitive devices in bulk silica glass, Optics Express, vol.17, issue.12, p.9515, 2009.
URL : https://hal.archives-ouvertes.fr/ujm-00387072

R. Taylor, C. Hnatovsky, and E. Simova, Applications of femtosecond laser induced self-organized planar nanocracks inside fused silica glass, Laser & Photonics Review, vol.2, issue.1-2, pp.26-46, 2008.

J. Zhang, M. Gecevi?ius, M. Beresna, and P. G. Kazansky, Seemingly Unlimited Lifetime Data Storage in Nanostructured Glass, Physical Review Letters, vol.112, issue.3, p.33901, 2014.

T. H. Her, R. J. Finlay, C. Wu, S. Deliwala, and E. Mazur, Microstructuring of silicon with femtosecond laser pulses, Applied Physics Letters, vol.73, issue.12, pp.1673-1675, 1998.

M. Halbwax, T. Sarnet, P. H. Delaporte, M. Sentis, H. Etienne et al., Micro and nano-structuration of silicon by femtosecond laser: Application to silicon photovoltaic cells fabrication, Thin Solid Films, vol.516, issue.20, pp.6791-6795, 2008.
URL : https://hal.archives-ouvertes.fr/hal-00317525

J. E. Sipe, J. F. Young, J. S. Preston, and H. M. Van-driel, Laser-induced periodic surface structure. I. Theory, Physical Review B, vol.27, issue.2, pp.1141-1154, 1983.

D. E. Grady, The spall strength of condensed matter, Journal of the Mechanics and Physics of Solids, vol.36, issue.3, pp.353-384, 1988.

R. Stoian, M. Wollenhaupt, T. Baumert, and I. V. Hertel, Temporal Pulse Tailoring in Ultrafast Laser Manufacturing Technologies, Laser Precision Microfabrication, vol.135, pp.121-144, 2010.

A. Marcinkevi\vcius, S. Juodkazis, S. Matsuo, V. Mizeikis, and H. Misawa, Application of Bessel Beams for Microfabrication of Dielectrics by Femtosecond Laser, Japanese Journal of Applied Physics, vol.40, issue.Part 2, No. 11A, pp.L1197-L1199, 2001.

V. Zambon, N. Mccarthy, and M. Piché, Laser micromachining of transparent glass using ultrafast Bessel beams, Photonics North 2009, p.738632, 2009.

S. Mitra, M. Chanal, R. Clady, A. Mouskeftaras, and D. Grojo, Millijoule femtosecond micro-Bessel beams for ultra-high aspect ratio machining, Applied Optics, vol.54, issue.24, p.7358, 2015.
URL : https://hal.archives-ouvertes.fr/hal-01418530

L. Yang, D. Qian, C. Xin, Z. Hu, S. Ji et al., Two-photon polymerization of microstructures by a non-diffraction multifoci pattern generated from a superposed Bessel beam, Optics Letters, vol.42, issue.4, p.743, 2017.

Y. Matushiro and W. Watanabe, Femtosecond laser processing of polymethyl methacrylate with an axicon, J Las Micro Nanoeng, vol.11, pp.59-65, 2016.

X. Tsampoula, V. Garcés-chávez, and M. Comrie, Femtosecond cellular transfection using a nondiffracting light beam, Appl Phys Lett, vol.91, p.53902, 2007.

J. Dudutis, P. Ge?ys, and G. Ra?iukaitis, Non-ideal axicon-generated Bessel beam application for intra-volume glass modification, Opt Express, vol.25, pp.28433-28443, 2016.

J. Durnin, J. J. Miceli, and J. H. Eberly, Diffraction-free beams, Phys Rev Lett, vol.58, pp.1499-1501, 1987.

C. Sheppard and T. Wilson, Gaussian-beam theory of lenses with annular aperture, IEE J Microw Opt Acoust, vol.2, pp.105-112, 1978.

J. H. Mcleod, The axicon: a new type of optical element, J Opt Soc Am, vol.44, pp.592-597, 1954.

R. M. Herman and T. A. Wiggins, Production and uses of diffractionless beams, J Opt Soc Am A, vol.8, pp.932-942, 1991.

F. Gori, G. Guattari, and C. Padovani, Bessel-Gauss beams, Opt Commun, vol.64, pp.491-495, 1987.

P. K. Velpula, M. K. Bhuyan, and F. Courvoisier, Spatio-temporal dynamics in nondiffractive Bessel ultrafast laser nanoscale volume structuring, Laser Photonics Rev, vol.2, pp.230-244, 2016.
URL : https://hal.archives-ouvertes.fr/ujm-01346653

D. Mcgloin and K. Dholakia, Bessel beams: diffraction in a new light, Contemp Phys, vol.46, pp.15-28, 2005.

D. Duocastella and C. Arnold, Bessel and annular beams for materials processing, Laser Photonics Rev, vol.6, pp.607-621, 2012.

T. ?i?már and K. Dholakia, Tunable Bessel light modes: engineering the axial propagation, Opt Express, vol.17, pp.15558-15570, 2009.

F. He, J. Yu, and Y. Tan, Tailoring femtosecond 1.5 µm Bessel beams for manufacturing high-aspect-ratio through-silicon vias, Sci Rep, vol.7, p.40785, 2017.

M. K. Bhuyan, P. K. Velpula, and M. Somayaji, 3D Nano-fabrication using controlled Bessel-glass interaction in ultrafast modes, J Las Micro Nanoeng, vol.12, pp.274-280, 2017.
URL : https://hal.archives-ouvertes.fr/ujm-01667880

R. Meyer, L. Froehly, and R. Giust, Extremely high-aspect-ratio ultrafast Bessel beam generation and stealth dicing of multi-millimeter thick glass, Appl Phys Lett, vol.114, 2019.
URL : https://hal.archives-ouvertes.fr/hal-02382663

E. Mcleod and C. B. Arnold, Subwavelength direct-write nanopatterning using optically trapped microspheres, Nat Nanotechnol, vol.3, pp.413-417, 2008.

M. K. Bhuyan, F. Courvoisier, and P. A. Lacourt, High aspect ratio nanochannel machining using single shot femtosecond Bessel beams, Appl Phys Lett, vol.97, p.81102, 2010.
URL : https://hal.archives-ouvertes.fr/hal-00517173

J. Amako, D. Sawaki, and E. Fujii, Microstructuring transparent materials by use of nondiffracting ultrashort pulse beams generated by diffractive optics, J Opt Soc Am B, vol.20, p.2562, 2003.

M. Mikutis, T. Kudrius, and G. ?lekys, High 90% efficiency Bragg gratings formed in fused silica by femtosecond Gauss-Bessel laser beams, Opt Mat Express, vol.3, pp.1862-1871, 2013.

K. Mishchik, R. Beuton, and O. Dematteo-caulier, Improved laser glass cutting by spatio-temporal control of energy deposition using bursts of femtosecond pulses, Opt Express, vol.25, pp.33271-33282, 2017.
URL : https://hal.archives-ouvertes.fr/hal-01671239

L. Rapp, R. Meyer, and L. Furfaro, High speed cleaving of crystals with ultrafast Bessel beams, Opt Express, vol.25, pp.9312-9317, 2017.
URL : https://hal.archives-ouvertes.fr/hal-02134472

J. Dudutis, R. Stonys, and G. Ra?iukaitis, Glass dicing with elliptical Bessel beam, Opt Laser Technol, vol.111, pp.331-337, 2019.

G. Zhang, R. Stoian, and W. Zhao, Femtosecond laser Bessel beam welding of transparent to non-transparent materials with large focal-position tolerant zone, Opt Express, vol.26, pp.917-926, 2018.
URL : https://hal.archives-ouvertes.fr/ujm-01682171

M. Jenne, D. Flamm, and T. Ouaj, Glass cutting optimization with pump-probe microscopy and Bessel beam profiles, Proc SPIE, vol.10522, p.1052216, 2018.

M. Jenne, D. Flamm, and T. Ouaj, High-quality tailored-edge cleaving using aberration-corrected Bessel-like beams, Opt Lett, vol.43, pp.2164-2167, 2018.

R. Stoian, M. K. Bhuyan, and G. Cheng, Ultrafast Bessel beams; advanced tools for laser material processing, Adv Opt Technol, vol.7, pp.165-174, 2018.

R. Meyer, M. Jacquot, and R. Giust, Single-shot ultrafast laser processing of high-aspect-ratio nanochannels using elliptical Bessel beams, Opt Lett, vol.43, pp.4307-4310, 2017.
URL : https://hal.archives-ouvertes.fr/hal-02134479

S. Orlov, V. Vosylius, and P. Gotovski, Vector beams with parabolic and elliptic cross-sections for laser material processing applications, J Las Micro Nanoeng, vol.13, pp.280-286, 2018.

I. Alexeev, H. K. Leitz, and A. Otto, Application of Bessel beams for ultrafast laser volume structuring of non transparent media, Phys Procedia, vol.5, pp.533-540, 2010.

H. D. Nguyen, X. Sedao, and N. Faure, Advanced ultrafast laser Bessel beam for machining metallic materials, LAMP 2019 International Congress on Laser Advanced Materials Processing, 2019.
URL : https://hal.archives-ouvertes.fr/ujm-02471544

J. Hiroshima,

X. Liu, Q. Li, and A. Sikora, Truncated Gaussian-Bessel beams for short-pulse processing of small-aspect-ratio micro-channels in dielectrics, Opt Express, vol.27, pp.6996-7008, 2019.
URL : https://hal.archives-ouvertes.fr/hal-02138270

Y. Zhang, G. D. Zhang, and C. Chen, Transmission volume phase holographic gratings in photo-thermo-refractive glass written with femtosecond laser Bessel beams, Opt Mat Express, vol.6, pp.3491-3499, 2016.

G. Zhang, G. Cheng, D. 'amico, and C. , Efficient point-by-point Bragg gratings fabricated in embedded laser-written silica waveguides using ultrafast Bessel beams, Opt Lett, vol.43, pp.2161-2164, 2018.
URL : https://hal.archives-ouvertes.fr/ujm-01779775

G. Martin, M. K. Bhuyan, and J. Troles, Near infrared spectro-interferometer using femtosecond laser written GLS embedded waveguides and nano-scatterers, Opt Express, vol.25, pp.8386-8397, 2017.

L. Coarer, E. Blaize, S. Benech, and P. , Wavelength-scale stationary-wave integrated Fourier-transform spectrometry, Nat Photonics, vol.1, pp.473-478, 2007.
URL : https://hal.archives-ouvertes.fr/hal-00166129

R. Gadonas, V. Jarutis, and R. Pa?kauskas, Self-action of Bessel beam in nonlinear medium, Opt Commun, vol.196, pp.309-316, 2001.

D. Faccio, E. Rubino, and A. Lotti, Nonlinear light-matter interaction with femtosecond high-angle Bessel beams, Phys Rev A, vol.85, p.33829, 2012.

P. Polesana, M. Franco, and A. Couairon, Filamentation in Kerr media from pulsed Bessel beams, Phys Rev A, vol.77, p.43814, 2008.
URL : https://hal.archives-ouvertes.fr/hal-00558943

K. Itoh, W. Watanabe, and S. Nolte, Ultrafast processes for bulk modification of transparent materials, MRS Bull, vol.31, pp.620-625, 2006.

P. Balling and J. Schou, Femtosecond-laser ablation dynamics of dielectrics: basics and applications for thin films, Rep Prog Phys, vol.76, p.36502, 2013.

R. R. Gattass and E. Mazur, Femtosecond laser micromachining in transparent materials, Nat Photonics, vol.2, pp.219-225, 2008.

K. M. Davis, K. Miura, and N. Sugimoto, Writing waveguides in glass with a femtosecond laser, Opt Lett, vol.21, pp.1729-1731, 1996.

E. N. Glezer and E. Mazur, Ultrafast-laser driven micro-explosions in transparent materials, Appl Phys Lett, vol.71, pp.882-884, 1997.

P. Martin, S. Guizard, and P. Daguzan, Subpicosecond study of carrier trapping dynamics in wide-band-gap crystals, Phys Rev B, vol.55, pp.5799-5810, 1997.

P. Audebert, P. Daguzan, D. Santos, and A. , Space-time observations of an electron gas in SiO 2, Phys Rev Lett, vol.73, pp.1990-1993, 1994.

M. Watanabe, S. Juodkazis, and H. Sun, Luminescence and defect formation by visible and near-infrared irradiation of vitreous silica, Phys Rev B, vol.60, pp.9959-9964, 1999.

J. Chan, T. Huser, and S. Risbud, Modification of the fused silica glass network associated with waveguide fabrication using femtosecond laser pulses, Appl Phys A: Mater Sci Process, vol.76, pp.367-372, 2003.

K. Mishchik, D. 'amico, C. Velpula, and P. K. , Ultrafast laser induced electronic and structural modifications in bulk fused silica, J Appl Phys, vol.114, p.133502
URL : https://hal.archives-ouvertes.fr/ujm-00869169

M. Lancry, B. Poumellec, and A. Chahid-erraji, Dependence of the femtosecond laser refractive index change thresholds on the chemical composition of doped-silica glasses, Opt Mat Express, vol.1, pp.711-723, 2011.

S. M. Eaton, H. Zhang, and P. R. Herman, Heat accumulation effects in femtosecond laser written waveguides with variable repetition rate, Opt Express, vol.13, pp.4708-4716, 2005.

Y. Liu, M. Shimizu, and B. Zhu, Micromodification of element distribution in glass using femtosecond laser irradiation, Opt Lett, vol.34, pp.136-138, 2009.

Y. Yu, L. Jian, and Q. Cao, Pump-probe imaging of the fs-ps-ns dynamics during femtosecond laser Bessel beam drilling in PMMA, Opt Express, vol.23, pp.32728-32735, 2015.

S. Ahn, J. Choi, and J. Noh, High aspect ratio nanoholes in glass generated by femtosecond laser pulses with picosecond intervals, Opt Laser Eng, vol.101, pp.85-88, 2018.

M. K. Bhuyan, P. K. Velpula, and J. P. Colombier, Single-shot high aspect ratio bulk nanostructuring of fused silica using chirpcontrolled ultrafast laser Bessel beams, Appl Phys Lett, vol.104, p.21107, 2014.
URL : https://hal.archives-ouvertes.fr/ujm-00931776

M. K. Bhuyan, M. Somayaji, and A. Mermillod-blondin, Ultrafast laser nanostructuring in bulk silica, a "slow" microexplosion, Optica, vol.4, pp.951-958, 2017.
URL : https://hal.archives-ouvertes.fr/ujm-01578041

A. Vailionis, E. G. Gamaly, and V. Mizeikis, Evidence of super-dense aluminium synthesized by ultrafast microexplosion, Nat Comm, vol.2, p.445, 2011.

L. Rapp, B. Haberl, and C. J. Pickard, Evidence of new tetragonal polymorphs of silicon formed through ultrafast laser-induced microexplosion, Nat Comm, vol.6, p.7555, 2015.

S. Juodkazis, K. Nishimura, and S. Tanaka, Laser-induced microexplosion in the bulk of a sapphire crystal: Evidence of Mb pressures, Phys Rev Lett, vol.96, p.166101, 2006.

R. Beuton, B. Chimier, and J. Brei, Thermo-elasto-plastic simulations of femtosecond laser-induced multiple-cavity in fused silica, Appl Phys A: Mater Sci Process, vol.124, p.324, 2018.
URL : https://hal.archives-ouvertes.fr/hal-02329613

J. Wang, A. M. Rajendran, and A. M. Dongare, Atomic scale modeling of shock response of fused silica and a-quartz, J Mater Sci, vol.50, pp.8128-8141, 2015.

S. Juodkazis, H. Misawa, and E. G. Gamaly, Is the nano-explosion really microscopic?, J. Non-Cryst Solids, vol.355, pp.1160-1162, 2009.

R. G. Kraus, S. T. Stewart, and D. C. Swift, Shock vaporization of silica and the thermodynamics of planetary impact events, J Geophys Res, vol.117, p.9009, 2012.

H. Melosh, A hydrocode equation of state for SiO 2, Meteorit Planet Sci, vol.42, pp.2079-2098, 2007.

A. B. Medvedev, Equation of state of silicon dioxide with allowance for evaporation, dissociation, and ionization, Combust Explos Shock Waves, vol.52, pp.463-475, 2016.

J. Eggers, Nonlinear dynamics and breakup of free-surface flows, Rev Mod Phys, vol.69, pp.865-930, 1997.

L. Rapp, R. Meyer, and R. Giust, High aspect ratio micro-explosions in the bulk of sapphire generated by femtosecond Bessel beams, Sci Rep, vol.6, p.34286, 2016.
URL : https://hal.archives-ouvertes.fr/hal-02134468

A. Rudenko, J. P. Colombier, and T. E. Itina, From random inhomogeneities to periodic nanostructures induced in bulk silica by ultrashort laser, Phys Rev B, vol.93, p.75427, 2016.
URL : https://hal.archives-ouvertes.fr/ujm-01340985

M. Lancry, B. Poumellec, and J. Canning, Ultrafast nanoporous silica formation driven by femtosecond laser irradiation, Laser Photonics Rev, vol.7, pp.953-962, 2013.

A. Rudenko, J. P. Colombier, and T. E. Itina, Nanopore-mediated ultrashort laser-induced formation and erasure of volume nanogratings in glass, Phys Chem Chem Phys, vol.20, pp.5887-5899, 2018.
URL : https://hal.archives-ouvertes.fr/ujm-02003605

G. Cheng, A. Rudenko, and C. Damico, Embedded nanogratings in bulk fused silica under non-diffractive Bessel ultrafast laser irradiation, Appl Phys Lett, vol.110, p.261901, 2017.
URL : https://hal.archives-ouvertes.fr/ujm-01845207

A. Gil-villalba, C. Xie, and R. Salut, Deviation from threshold model in ultrafast laser ablation of graphene at sub-micron scale, Appl Phys Lett, vol.107, p.61103, 2015.

S. Kumar, S. M. Eaton, and M. Bollani, Laser surface structuring of diamond by means of pulsed Bessel beams, Sci Rep, vol.8, p.14021, 2018.

C. Xie, V. Jukna, and C. Milián, Tubular filamentation for laser material processing, Sci Rep, vol.5, p.8914, 2015.
URL : https://hal.archives-ouvertes.fr/ujm-01179794