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TECHNOLOGICAL PROCESS FOR THE FABRICATION OF THICK TITANIA FILMS AND DEEP TiO2 SOL-GEL GRATING

Maria Alejandra Usuga Higuita 1 Nicolas Crespo-Monteiro 1 F Vocanson 1 Michel Langlet 2 Yves Jourlin 1 
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 LMGP - Laboratoire des matériaux et du génie physique
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https://hal-ujm.archives-ouvertes.fr/ujm-02462166
Contributor : Isabelle Verrier Connect in order to contact the contributor
Submitted on : Friday, January 31, 2020 - 10:30:09 AM
Last modification on : Sunday, June 26, 2022 - 2:46:33 AM

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  • HAL Id : ujm-02462166, version 1

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UNIV-ST-ETIENNE | UGA | CNRS | LMGP | INC-CNRS | UDL

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Maria Alejandra Usuga Higuita, Nicolas Crespo-Monteiro, F Vocanson, Michel Langlet, Yves Jourlin. TECHNOLOGICAL PROCESS FOR THE FABRICATION OF THICK TITANIA FILMS AND DEEP TiO2 SOL-GEL GRATING. JNTE, Nov 2019, Grenoble, France. ⟨ujm-02462166⟩

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