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TECHNOLOGICAL PROCESS FOR THE FABRICATION OF THICK TITANIA FILMS AND DEEP TiO2 SOL-GEL GRATING

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https://hal-ujm.archives-ouvertes.fr/ujm-02462166
Contributor : Isabelle Verrier <>
Submitted on : Friday, January 31, 2020 - 10:30:09 AM
Last modification on : Monday, July 20, 2020 - 10:06:05 AM

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  • HAL Id : ujm-02462166, version 1

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Maria Alejandra Usuga Higuita, Nicolas Crespo-Monteiro, F Vocanson, Michel Langlet, Yves Jourlin. TECHNOLOGICAL PROCESS FOR THE FABRICATION OF THICK TITANIA FILMS AND DEEP TiO2 SOL-GEL GRATING. JNTE, Nov 2019, Grenoble, France. ⟨ujm-02462166⟩

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