Deep‐UV lithography of nanocomposite thin films into magnetooptical gratings with submicron periodicity

Clémentine Bidaud (1) , Dominique Berling (1) , Emilie Gamet (2) , D. Jamon (2) , Loïc Vidal (3) , Sophie Neveu (4) , O. Soppera (1) , Francois Royer (2)

1 IS2M - Institut de Science des Matériaux de Mulhouse
2 LHC - Laboratoire Hubert Curien
3 ICSI - Institut de Chimie des Sufaces et Interfaces
4 PHENIX - PHysicochimie des Electrolytes et Nanosystèmes InterfaciauX

Domaines: Chimie; Physique [physics]

Clémentine Bidaud, Dominique Berling, Emilie Gamet, D. Jamon, Loïc Vidal, et al.. Deep‐UV lithography of nanocomposite thin films into magnetooptical gratings with submicron periodicity. ChemPhotoChem, 2020, ⟨10.1002/cptc.202000048⟩. ⟨ujm-02899691⟩