TiN thin film made by nitridation of TiO2 sol-gel layer and rapid thermal nitridation process (RTN).

Arnaud Valour (1) , Maria Alejandra Usuga Higuita (1) , Nicolas Crespo-Monteiro (1) , Francis Vocanson (1) , D. Jamon (1) , Stéphanie Reynaud (1) , Christophe Donnet (1) , M. Langlet (2) , Yves Jourlin (1)

1 LHC - Laboratoire Hubert Curien
2 LMGP - Laboratoire des matériaux et du génie physique

Domaines: Matériaux

Arnaud Valour, Maria Alejandra Usuga Higuita, Nicolas Crespo-Monteiro, Francis Vocanson, D. Jamon, et al.. TiN thin film made by nitridation of TiO2 sol-gel layer and rapid thermal nitridation process (RTN).. International Sol-Gel Conference Solgel 2022, Jul 2022, Lyon, France. ⟨ujm-03802605⟩