Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy

Estelle Neiss (1) , Manuel Flury (2) , Philippe Gérard (1) , Loïc Mager (3) , Jean-Luc Rehspringer (3) , Alain Fort (3) , Paul Montgomery (4) , Joël Fontaine (1) , Thierry Engel (1) , Abderrazzaq Benatmane (4)

1 LSP - Laboratoire des Systèmes Photoniques
2 LHC - Laboratoire Hubert Curien
3 IPCMS - Institut de Physique et Chimie des Matériaux de Strasbourg
4 InESS - Institut d'Electronique du Solide et des Systèmes

Domaines: Optique / photonique

Estelle Neiss, Manuel Flury, Philippe Gérard, Loïc Mager, Jean-Luc Rehspringer, et al.. Multi-level relief structures in sol-gel and photoresist fabricated by laser ablation and analyzed with coherence probe microscopy. Applied Surface Science, 2007, 254, pp.1986-1992. ⟨ujm-00335240⟩