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Université Jean Monnet – Saint-Etienne |  |
Journal articles
Flying phase mask for the printing of long submicron-period stitchingless gratings
Abstract : Long and stitchingless gratings are printed by means of a read/write head comprising a phase mask illuminated by an intensity modulated laser beam and a reference grating displacement sensor which dictates the modulation period real time. A nearly perfect grating copying is achieved by fixing the sensor grating scale and the written grating substrate on a long platform sliding under the read/write head
Cited literature [3 references]
https://hal-ujm.archives-ouvertes.fr/ujm-00358901
Contributor : Yves Jourlin <>
Submitted on : Thursday, February 5, 2009 - 5:31:42 PM
Last modification on : Monday, January 13, 2020 - 5:46:02 PM
Long-term archiving on: : Saturday, November 26, 2016 - 5:11:24 AM
Contributor : Yves Jourlin <>
Submitted on : Thursday, February 5, 2009 - 5:31:42 PM
Last modification on : Monday, January 13, 2020 - 5:46:02 PM
Long-term archiving on: : Saturday, November 26, 2016 - 5:11:24 AM
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flying_phase_mask_MNE.pdf
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