Flying phase mask for the printing of long submicron-period stitchingless gratings
Résumé
Long and stitchingless gratings are printed by means of a read/write head comprising a phase mask illuminated by an intensity modulated laser beam and a reference grating displacement sensor which dictates the modulation period real time. A nearly perfect grating copying is achieved by fixing the sensor grating scale and the written grating substrate on a long platform sliding under the read/write head
Domaines
Optique [physics.optics]
Origine : Fichiers produits par l'(les) auteur(s)
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