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Application of neural classification in ellipsometry for robust thin films characterization

Issam Gereige Robert Stéphane 1 
1 DIOM - Dispositifs et Instrumentation en Optoélectronique et micro-ondes
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https://hal-ujm.archives-ouvertes.fr/ujm-00428541
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Submitted on : Thursday, October 29, 2009 - 9:14:27 AM
Last modification on : Monday, February 22, 2021 - 5:46:05 PM

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  • HAL Id : ujm-00428541, version 1

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UNIV-ST-ETIENNE | UDL

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Issam Gereige, Robert Stéphane. Application of neural classification in ellipsometry for robust thin films characterization. Thin Solid Films, Elsevier, 2009. ⟨ujm-00428541⟩

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