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Thermal Properties of SiN, DLC and Diamond Membranes

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https://hal-ujm.archives-ouvertes.fr/ujm-00549339
Contributor : Florence Garrelie <>
Submitted on : Tuesday, December 21, 2010 - 5:25:10 PM
Last modification on : Tuesday, March 31, 2020 - 1:27:51 AM

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  • HAL Id : ujm-00549339, version 1

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Aurélien Sikora, Florence Garrelie, A.-S. Loir, Jacques Richard, David Eon, et al.. Thermal Properties of SiN, DLC and Diamond Membranes. Diamond 2010, Sep 2010, Budapest, Hungary. ⟨ujm-00549339⟩

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