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https://hal-ujm.archives-ouvertes.fr/ujm-00549339
Submitted on : Tuesday, December 21, 2010-5:25:10 PM
Last modification on : Wednesday, December 28, 2022-3:50:36 AM
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- HAL Id : ujm-00549339 , version 1
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Aurélien Sikora, Florence Garrelie, A.-S. Loir, Jacques Richard, David Eon, et al.. Thermal Properties of SiN, DLC and Diamond Membranes. Diamond 2010, Sep 2010, Budapest, Hungary. ⟨ujm-00549339⟩
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