Thermal Properties of SiN, DLC and Diamond Membranes

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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-00549339
Contributor : Florence Garrelie <>
Submitted on : Tuesday, December 21, 2010 - 5:25:10 PM
Last modification on : Wednesday, February 13, 2019 - 10:06:08 AM

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Aurélien Sikora, Florence Garrelie, A.-S. Loir, Jacques Richard, David Eon, et al.. Thermal Properties of SiN, DLC and Diamond Membranes. Diamond 2010, Sep 2010, Budapest, Hungary. ⟨ujm-00549339⟩

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