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Thermal Properties of SiN, DLC and Diamond Membranes

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Engineering Sciences [physics] Optics / Photonic

Florence Garrelie  : Connect in order to contact the contributor

https://hal-ujm.archives-ouvertes.fr/ujm-00549339

Submitted on : Tuesday, December 21, 2010-5:25:10 PM

Last modification on : Wednesday, December 28, 2022-3:50:36 AM

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ujm-00549339 , version 1 (21-12-2010)

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  • HAL Id : ujm-00549339 , version 1

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Aurélien Sikora, Florence Garrelie, A.-S. Loir, Jacques Richard, David Eon, et al.. Thermal Properties of SiN, DLC and Diamond Membranes. Diamond 2010, Sep 2010, Budapest, Hungary. ⟨ujm-00549339⟩

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