New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.

V. Gâté 1, 2, * Y. Jourlin 1 Michel Langlet 2 Francis Vocanson 1 Gérard Bernaud 1 C. Veillas 1 A. Cazier 1 O. Dellea 3
* Corresponding author
1 LHC - Laboratoire Hubert Curien [Saint Etienne]
2 LMGP - Laboratoire des matériaux et du génie physique
3 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux
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Conference papers
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https://hal-ujm.archives-ouvertes.fr/ujm-00699339
Contributor : Francis Vocanson <>
Submitted on : Sunday, May 20, 2012 - 6:06:13 PM
Last modification on : Monday, July 8, 2019 - 11:26:03 AM

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  • HAL Id : ujm-00699339, version 1

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V. Gâté, Y. Jourlin, Michel Langlet, Francis Vocanson, Gérard Bernaud, et al.. New industrial and innovative writing machine for the fabrication of sol-gel TiO2 based sub-micrometric period diffraction gratings.. E-MRS 2012 Spring Meeting symposium V, Laser materials processing for micro and nano applications, May 2012, Strasbourg, France. ⟨ujm-00699339⟩

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