Cost effective and large area process for the functionalization and surface micro-structuring using photo-patternable TiO2 sol-gel process and colloidal photolithography

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https://hal-ujm.archives-ouvertes.fr/ujm-01301967
Contributor : Francis Vocanson <>
Submitted on : Wednesday, April 13, 2016 - 1:21:19 PM
Last modification on : Monday, July 8, 2019 - 11:26:04 AM

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  • HAL Id : ujm-01301967, version 1

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Loic Berthod, Olga Shavdina, Francis Vocanson, Michel Langlet, O. Dellea, et al.. Cost effective and large area process for the functionalization and surface micro-structuring using photo-patternable TiO2 sol-gel process and colloidal photolithography. 2016 PHOTONICS EUROPE (SPIE), Apr 2016, BRUXELLES, Belgium. ⟨ujm-01301967⟩

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