Cost effective and large area process for the functionalization and surface micro-structuring using photo-patternable TiO2 sol-gel process and colloidal photolithography

Loic Berthod; Olga Shavdina; Francis Vocanson; Michel Langlet; O. Dellea; C. Veillas; S Reynaud; I. Verrier; Yves Jourlin

Cost effective and large area process for the functionalization and surface micro-structuring using photo-patternable TiO2 sol-gel process and colloidal photolithography

Loic Berthod ^{1, 2} Olga Shavdina ^{1, 3} Francis Vocanson ¹ Michel Langlet ² O. Dellea ³ C. Veillas ¹ S Reynaud ¹ I. Verrier ⁴ Yves Jourlin ^{1, *}

* Corresponding author

1 LHC - Laboratoire Hubert Curien [Saint Etienne]

2 LMGP - Laboratoire des matériaux et du génie physique

3 LITEN - Laboratoire d'Innovation pour les Technologies des Energies Nouvelles et les nanomatériaux

4 Laboratoire Hubert Curien / Eris

LHC - Laboratoire Hubert Curien [Saint Etienne]

Document type :

Conference papers

Domain :

Chemical Sciences / Material chemistry

Physics [physics] / Physics [physics] / Optics [physics.optics]

Complete list of metadatas

https://hal-ujm.archives-ouvertes.fr/ujm-01301967
Contributor : Francis Vocanson <>
Submitted on : Wednesday, April 13, 2016 - 1:21:19 PM
Last modification on : Monday, July 8, 2019 - 11:26:04 AM

Cost effective and large area process for the functionalization and surface micro-structuring using photo-patternable TiO2 sol-gel process and colloidal photolithography

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Cost effective and large area process for the functionalization and surface micro-structuring using photo-patternable TiO2 sol-gel process and colloidal photolithography

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