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Deep‐UV lithography of nanocomposite thin films into magnetooptical gratings with submicron periodicity

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https://hal-ujm.archives-ouvertes.fr/ujm-02899691
Contributor : Damien Jamon <>
Submitted on : Tuesday, November 17, 2020 - 4:29:35 PM
Last modification on : Friday, December 11, 2020 - 6:14:57 PM

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Clémentine Bidaud, Dominique Berling, Emilie Gamet, D. Jamon, Loïc Vidal, et al.. Deep‐UV lithography of nanocomposite thin films into magnetooptical gratings with submicron periodicity. ChemPhotoChem, Wiley, 2020, ⟨10.1002/cptc.202000048⟩. ⟨ujm-02899691⟩

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