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Deep‐UV lithography of nanocomposite thin films into magnetooptical gratings with submicron periodicity

Clémentine Bidaud 1 Dominique Berling 1 Emilie Gamet 2 D. Jamon 2 Loïc Vidal 3 Sophie Neveu 4 O. Soppera 1 Francois Royer 2 
1 IS2M - Institut de Science des Matériaux de Mulhouse
2 LHC - Laboratoire Hubert Curien [Saint Etienne]
3 ICSI - Institut de Chimie des Sufaces et Interfaces
4 PHENIX - PHysicochimie des Electrolytes et Nanosystèmes InterfaciauX
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https://hal-ujm.archives-ouvertes.fr/ujm-02899691
Contributor : Damien Jamon Connect in order to contact the contributor
Submitted on : Tuesday, November 17, 2020 - 4:29:35 PM
Last modification on : Sunday, June 26, 2022 - 2:57:28 AM
Long-term archiving on: : Thursday, February 18, 2021 - 8:03:46 PM

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Clémentine Bidaud, Dominique Berling, Emilie Gamet, D. Jamon, Loïc Vidal, et al.. Deep‐UV lithography of nanocomposite thin films into magnetooptical gratings with submicron periodicity. ChemPhotoChem, Wiley, 2020, ⟨10.1002/cptc.202000048⟩. ⟨ujm-02899691⟩

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