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TiN thin film made by nitridation of TiO2 sol-gel layer and rapid thermal nitridation process (RTN).

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https://hal-ujm.archives-ouvertes.fr/ujm-03802605
Contributor : Francis VOCANSON Connect in order to contact the contributor
Submitted on : Thursday, October 6, 2022 - 6:55:45 PM
Last modification on : Saturday, October 8, 2022 - 3:08:57 AM

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  • HAL Id : ujm-03802605, version 1

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Arnaud Valour, Maria Alejandra Usuga Higuita, Nicolas Crespo-Monteiro, Francis Vocanson, D. Jamon, et al.. TiN thin film made by nitridation of TiO2 sol-gel layer and rapid thermal nitridation process (RTN).. International Sol-Gel Conference Solgel 2022, Jul 2022, Lyon, France. ⟨ujm-03802605⟩

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